Reliable knowledge on material composition and properties are required in order to efficiently design MEMS/NEMS devices. Device sensitivity and mechanical performance is related to material properties. Materials properties often change or behave differently at micro/nano length scale. It may sometimes alter during rigorous fabrication process steps. Therefore, understanding of material properties are necessary however, probing it at such small scale is challenging. I use different non-invasive and invasive techniques to characterise material properties of the devices by using state of the art methods such as SEM (Scanning Electron Microscope) with EDS, X-ray analysis, optical profiler, contact profiler, thin film thickness measurements, and AFM (Atomic Force Microscopy).